| MINI Probe Station kit with wide platen bars for use with 100 mm / 4" wafers, complete with compound microscope and fiber optic illumination, 5X and 20X LWD objectives, 1 pair of large micropositioners with 1 µm resolution, probe holders, and 1 box of probe tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
FEATURES:
Compact size, 320 wide x 320 deep x 280 to 485 mm high (12.5" x 12.5" x 11" to 19"), that includes the scope
Low weight, 75 lbs
Affordable price, especially when compared to stations with Mitutoyo or Motic scope
Ideal for probing with micron accuray on small high density wafers, 100 mm / 4" or less or bare die
Stage X/Y from front and side adjustable
Coarse adjustment of chuck theta
Backlash-free movement
1 year manufacturer warranty |
