| 150 mm / 6" Vacuum Chuck and Stage assembly for probe station as used on BD-6, see probe station page. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue. Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 6", 4", 3" wafers. Vacuum pump will be needed and is not included in this offer. FEATURES: For wafers, 6" or less Chuck stage front and side adjustable Chuck theta adjustable Backlash-free movement SPECIFICATIONS: 150 mm / 6" stainless steel vacuum chuck Chuck stage allows 6" x 6" travel in X-Y directions Chuck theta: Coarse adjustment by 30 degrees 125 x 125 mm mounting holes 1 µm accuracy spindles Net weight: 19 kg or 42 lbs Operational Requirements: 7 liter/min 250 mmHg vacuum supply 1 year manufacturer warranty | |