| 150 mm / 6" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue. Picture shows 4" version.
Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 6", 4", 2" wafers. Vacuum pump will be needed and is not included in this offer.
FEATURES:
Ideal for small wafers, 6" or less
Chuck stage front and side adjustable
Chuck theta coarse adjustment
Z axis adjustment with micrometer
Backlash-free movement
SPECIFICATIONS:
6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta: coarse adjustment up to 30 degrees
Z-axis fine adjustment with micrometer, 1 turn (50 units) equals 0.25 mm, 1 unit is 5 µm
75 x 75 mm mounting holes
Total height from mounting plane to top of chuck 140 mm / 5.5" ± 2 mm
Net weight: 5.5 kg or 12 lbs
Operational Requirements: 7 liter/min 250 mmHg vacuum supply
1 year manufacturer warranty |
