Buiding Blocks for Probe Stations or build your own specialized test fixture.
Posted on 12/17/08
PSECKPE4T
100mm / 4in vacuum chuck + stage for probe station, fine theta adjust
100 mm / 4" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue. Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 4", 3", 2" wafers. Vacuum pump will be needed and is not included in this offer. FEATURES: Ideal for small wafers, 4" or less Chuck stage front and side adjustable Chuck theta fine adjustment with micrometer Backlash-free movement SPECIFICATIONS: 4" stainless steel vacuum chuck Chuck stage allows 4" x 4" travel in X-Y directions Chuck theta is fine adjustable by up to 30 degrees 4 mounting holes with M8 threads on 75 x 75 mm square Total height from mounting plane to top of chuck 140 mm 0.4 mm / 63.5 tpi spindles Net weight: 3.6 kg or 8 lbs Operational Requirements: 7 liter/min 250 mmHg vacuum supply 1 year manufacturer warranty
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