Buiding Blocks for Probe Stations or build your own specialized test fixture.

Posted on 08/23/09

PSECKPE4T

100mm / 4in vacuum chuck + stage for probe station, fine theta adjust

100 mm / 4" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue.
Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 4", 3", 2" wafers. Vacuum pump will be needed and is not included in this offer.
FEATURES:
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta fine adjustment with micrometer 
Backlash-free movement
SPECIFICATIONS:
4" stainless steel vacuum chuck
Chuck stage allows 4" x 4" travel in X-Y directions
Chuck theta is fine adjustable by up to 30 degrees
4 mounting holes with M8 threads on 75 x 75 mm square

 

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UPS ground or USPS Priority only

 
 

 
 

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$

2419

€

1753

£

1521

AUD

2991

Rs121335

Total height from mounting plane to top of chuck 140 mm
0.4 mm / 63.5 tpi spindles
Net weight: 3.6 kg or 8 lbs
Operational Requirements: 7 liter/min 250 mmHg vacuum supply

1 year manufacturer warranty

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