Posted on 8/23/09

Probe Stations, bare, and as kit, with or without microscope.

On 100 mm or 4” probe stations the scope options are stereo zoom microscopes from Meiji or supplied by the probe station manufacturer.
When probing smaller features a stereo zoom scope is not any more adequate. That applies to 150 mm / 6” and larger wafers and even to 100 mm / 4” stations on testing high density dies or other high density parts. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU1000 (around $4K) based solutions.

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Description

Part # / Price

100mm / 4in Probe Station bare, no scope manipulators tips

PSESPE4B         US$2975

100mm / 4in Probe Station bare, wide platen bars, no scope manipulators tips

PSESPE4BW        US$2999

Complete 100mm / 4in Probe Station kit with scope, 2 micropositioners, probe holders/tips

PSESPE4C         US$4995

Complete 100mm / 4in Probe Station kit with scope, wide platen bars, 2 micropositioners, probe holders/tips

PSESPE4CW        US$5045

Complete 100mm / 4in Probe Station kit with scope, wide platen bars, 2 mid-size micropositioners, probe holders/tips

PSESPE4CWM       US$5643

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, 2 micropositioners, probe holders/tips

PSESPE4CE5       US$5560

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, wide platen bars, 2 micropositioners, probe holders/tips

PSESPE4CWE5      US$5610

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, wide platen bars, 2 mid-size micropositioners, probe holders/tips

PSESPE4CWE5 M        US$6253

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 mid size micropositioners, probe holders/tips

PSESPE4CWMM K0520        US$9569

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 full size micropositioners, probe holders/tips

PSESPE4CWLM K0520        US$10771

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, 2 micropositioners, probe holders/tips

PSESKP4CE5       US$9245

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 mid size micropositioners, probe holders/tips

PSESKP4CMMK 0520         US$13215

Complete 100mm / 4in Probe Station kit with scope, 2 micropositioners, probe holders/tips

PSESKP4C         US$8295

100mm / 4in Probe Station kit, no scope, 2 micropositioners, probe holders/tips

PSESKP4        US$6950

6in Probe Station kit, scope not included, 2 micropositioners, probe holders/tips

PSESLC6        US$8688

6in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6M       US$9261

6in Probe Station kit, scope not included, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6L         US$10312

150mm/6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MM05 20K        US$13959

6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LM052 0K         US$14999

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MMI05 20         US$23286

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LMI05 20         US$24339

8in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders/tips

PSESLC8M       US$10599

8in Probe Station kit, scope not included, 2 large micropositioners, probe holders/tips

PSESLC8L         US$11649

6in Probe Station BD-6, scope not included, 2 micropositioners, probe holders/tips

PSESBD6        US$12948

8in Probe Station BD-8, scope not included, 2 micropositioners, probe holders/tips

PSESBD8        US$14948

8in Probe Station BD-8, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       US$19464

8in Probe Station BD-8, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       US$19999

300 mm / 12in Probe Station BD-12, scope not included, 2 micropositioners, probe holders/tips

PSESBD12         US$27615

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       US$30995

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       US$32349

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520D K        US$31495

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050D K        US$32649

Complete Cryogenic Probe Station with support structure, vacuum chamber, temperature control, liquide nitrogen module, 4 integrated micropositioners, microscope

PSECG196         US$59850

Complete Cryogenic Probe Station with Meiji Techno EMZ-13VX microscope, fiber optic illumination and ¼ wave plate in rotatable mount

PSECG196MVX      US$62280

Complete Cryogenic Probe Station with Optem Zoom 70XL, CCD imaging kit with 17" LCD display, fiber optic illumination

PSECG196Z70        US$59850

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