Probe Stations for various wafer sizes, bare or as kits, with or without microscope.

Posted on 08/23/09

PSESBD82050K

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

Probe Station for use with 12" (300 mm) or smaller wafers with 8", 6", 4" diameter, with compound microscope with 20X/50X LWD objectives. Included are 2 ball bearing micropositioners (in-line, 80 or 100 TPI), probe holders, and 1 box of probe tips.
Heavy Duty Manual Probe Station comes with many functions to speed up setup and changeover of test device. 6" and 8" versions are  available, too.
FEATURES:
Front adjustment of stage coordinates with extra large knobs
Easy loading / unloading of wafer
Quick Up / Down movement of platen with separate lever
Z-axis fine movement of platen with handwheel
Overdrive adjustment for probe card tip
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty
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$

32349

€

23441

£

20335

AUD

39995

Rs

1622602

MICROSCOPE:
Based on FU1000 focus block and comes with the following parts:
1 x FU1000 Focus Block with 40mm travel, quintuple nosepiece with 26 mm (Mitutoyo) threading
1 x MA655 Inclined Trinocular Head, Erect Image, no depolarizer
2 x MA407 DIN KHW10X compensating eyepiece, FN 20 (each)
1 x MA806 Infinity Corrected Vertical Koehler Illuminator
1 x FT190/115 Light Source: 120VAC, 50-60Hz
1 x FT190/12-36 Single arm light guide, 36", flexible
1 x OKHSL20 M Plan APO 20x NA=0.29 WD=31 mm Metallurgical objective
1 x OKHSL50 M Plan APO 50x NA=0.42 WD=20.5 mm Metallurgical objective
All scope parts except objectives and nosepiece come with lifetime limited warranty. Objectives and nosepiece are from a different supplier and carry a 5 year limited warranty.
Picture shows Meiji Techno FU1000 based scope with binocular head, actual offer is for a trinocular head!

SPECIFICATIONS:
8" stainless steel vacuum chuck
Chuck stage allows 8" x 8" travel in X-Y directions
Chuck theta is adjustable by up to 30 degrees
Microscope stage allows 1" x 1" travel
6 mm coarse Up/Down adjustment of platen with quick lever
25 mm fine adjustment with hand wheel
Platen allows placement of up to 12 manipulators
Footprint: 780 x 660 mm wide & deep (30.7" x 26")
Height without scope: 650 mm or 25.6"
Net weight without microscope: 74 kg or 163 lbs

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