Probe Stations for various wafer sizes, bare or as kits, with or without microscope.

Posted on 08/23/09

PSESPE4C

Complete 100mm / 4in Probe Station kit with scope, 2 micropositioners, probe holders/tips

MINI Probe Station kit for use with 4" or smaller wafers, complete with Stereo Zoom microscope with illumination, 1 pair of micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
FEATURES:
Compact size, 320 wide x 320 deep x 460 mm high (12.5" x 12.5" x 18"), that includes the scope
Low weight, 46 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement

1 year manufacturer warranty

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$

4995

€

3620

£

3140

AUD

6176

Rs

250545

MICROSCOPE:
Stereo Zoom
20X eyepieces
0.7X - 4.5X zoom
14X - 90X total magnification
Fluorescent illuminator

Optional: Platen bars for back and front (north/south)

SPECIFICATIONS:
4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height with scope installed: 460 mm or 18.1"
Net weight of base: 17 kg or 38 lbs

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