Probe Stations for various wafer sizes, bare or as kits, with or without microscope.

Posted on 08/23/09

PSESLC6MMI052 0

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

Probe Station kit for use with 150 mm / 6" wafers, Mitutoyo Finescope FS70, 2 ball bearing micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for advanced measurements. It offers most of the capabilities of larger units. A 8" version is available.
FEATURES:
Compact size, 520 wide x 520 deep x 460 mm high (20.5" x 20.5" x 18")
Low weight, 129 lbs without scope
Affordable price
Ideal for 150 mm / 6" wafers
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty

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$

23286

€

16874

£

14638

AUD

28790

Rs

1168008

MICROSCOPE:
Type: Compound
Focus Block with coarse / fine focusing and 50mm travel
Standard head for visible range (378-1852)
10X eyepieces with eyeguards (378-856 + 2 * 218380)
Standard quadruple nosepiece (378-019)
Halogen light source (989-105)
Fiber optic light guide (50AAB310)
M Plan APO 5X objective (378-802)
M Plan APO SL 20X objective (378-810)

SPECIFICATIONS:
150 mm / 6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Z adjustment by moving platen up or down
Platen allows placement of up to 8 manipulators
Footprint: 520 x 520 mm (20.5" x 20.5")
Net weight of base: 45 kg or 99 lbs

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