Probe Stations for various wafer sizes, bare or as kits, with or without microscope.

Posted on 08/23/09

PSESPE4B

100mm / 4in Probe Station bare, no scope manipulators tips

MINI Probe Station, bare, for use with 100 mm / 4" or smaller wafers, no microscope, illumination or micropositioners etc. Supply your own stereo zoom scope, manipulators, probe holders and tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
FEATURES:
Compact size, 320 wide x 320 deep x 400 mm high (12.5" x 12.5" x 16"), that includes the scope
Low weight, 38 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty

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$

2975

€

2156

£

1870

AUD

3678

Rs

149224

Optional: Platen bars for back and front (north/south)

SPECIFICATIONS:
4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height without scope: between 280 and 400 mm or 11"to 16"
Net weight of base: 17 kg or 38 lbs
2 platen bars 50 x 50 x 150 mm long

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