Posted on 8/23/09

8” to 12”(200 -300 mm) Probe Stations, bare, and as kit, with or without microscope.

On 200 mm or 8” probe stations the scope is typically a compound microscope.
When probing the smaller features of 150 mm wafers a stereo zoom scope is not any more adequate. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU1000 and FU3050 (around $4K) based solutions. Or if you would like a zoom scope then Qioptiq’s AZoom 2 and Micro are perfect choices. If budget is an important consideration then a zoom scope based on Meiji parts wins hand down.

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Description

Part # / Price

8in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders/tips

PSESLC8M       US$10599

8in Probe Station kit, scope not included, 2 large micropositioners, probe holders/tips

PSESLC8L         US$11649

8in Probe Station BD-8, scope not included, 2 micropositioners, probe holders/tips

PSESBD8        US$14948

8in Probe Station BD-8, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       US$19464

8in Probe Station BD-8, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       US$19999

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