Probe Stations for 8 and 12” (200 and 300 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on 08/23/09

PSESBD80520K

8in Probe Station BD-8, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

Probe Station for use with 200 mm / 8" or smaller wafers with 6", 4", 3" diameter, complete with scope and 5X and 20X LWD objectives. Included are 2 ball bearing micropositioners (in-line, 80 or 100 TPI), probe holders, and 1 box of probe tips.
Heavy Duty Manual Probe Station comes with many functions to speed up setup and changeover of test device. 6" and 12" versions are  available, too.
FEATURES:
Front adjustment of stage coordinates with extra large knobs
Easy loading / unloading of wafer
Quick Up / Down movement of platen with separate lever
Z-axis fine movement of platen with handwheel
Overdrive adjustment for probe card tip
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty
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$

19464

€

14104

£

12235

AUD

24064

Rs

976300

MICROSCOPE:
Based on FU1000 focus block and comes with the following parts:
1 x FU1000 Focus Block with 40mm travel, quintuple nosepiece with 26 mm (Mitutoyo) threading
1 x MA655/05 Inclined Trinocular Head, Erect Image with depolarizer
2 x MA407 DIN KHW10X compensating eyepiece, FN 20 (each)
1 x MA806 Infinity Corrected Vertical Koehler Illuminator
1 x FT190/115 Light Source: 120VAC, 50-60Hz
1 x FT190/12-36 Single arm light guide, 36", flexible
1 x OKHSL05 M Plan APO 5x NA=0.13 WD=44.5 mm Metallurgical objective
1 x OKHSL20 M Plan APO 20x NA=0.29 WD=31 mm Metallurgical EPI objective
All scope parts except objectives and nosepiece come with lifetime limited warranty. Objectives and nosepiece are from a different supplier and carry a 5 year limited warranty.
Picture shows Meiji Techno FU1000 based scope with binocular head, actual offer is for a trinocular head!

SPECIFICATIONS:
8" stainless steel vacuum chuck
Chuck stage allows 8" x 8" travel in X-Y directions
Chuck theta is adjustable by up to 30 degrees
Microscope stage allows 1" x 1" travel
6 mm coarse Up/Down adjustment of platen with quick lever
25 mm fine adjustment with hand wheel
Platen allows placement of up to 12 manipulators
Footprint: 780 x 660 mm wide & deep (30.7" x 26")
Height without scope: 650 mm or 25.6"
Net weight without microscope: 146 kg or 320 lbs

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