Posted on 8/23/09

6” (150 mm) Probe Stations, bare, and as kit, with or without microscope.

On 150 mm or 6” probe stations the scope is typically a compound microscope.
When probing the smaller features of 150 mm wafers a stereo zoom scope is not any more adequate. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU1000 (around $4K) based solutions. Or if you would like a zoom scope then Qioptiq’s AZoom 2 and Micro are perfevct choices. If budget is an important consideration then a zoom scope based on Meiji parts wins hand down

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Description

Part # / Price

6in Probe Station kit, scope not included, 2 micropositioners, probe holders/tips

PSESLC6        US$8688

6in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6M       US$9261

6in Probe Station kit, scope not included, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6L         US$10312

150mm/6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MM05 20K        US$13959

6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LM052 0K         US$14999

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MMI05 20         US$23286

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LMI05 20         US$24339

6in Probe Station BD-6, scope not included, 2 micropositioners, probe holders/tips

PSESBD6        US$12948

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