Probe Stations for 4” (100 mm) and smaller wafers, bare or as kit, with or without microscope.
Posted on May 04, 2012
100mm / 4in Probe Station bare with gold plated chuck, no scope, manipulators, tips
PSESPE4BG      CAD3228  US$3225
MINI Probe Station, bare, for use with 100 mm / 4" or smaller wafers, no microscope, illumination or micropositioners etc. Supply your own stereo zoom scope, manipulators, probe holders and tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
FEATURES:
Compact size, 320 wide x 320 deep x 400 mm high (12.5" x 12.5" x 16"), that includes the scope
Low weight, 32 lbs net
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty
Here is more information about this product, in auction format.
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Optional: Platen bars for back and front (north/south)
1 x FU3054 Focus Block with 30mm travel, quadruple nosepiece, 26 mm Mitutoyo threads allow direct mounting of Mitutoyo and workalike LWD objectives
1 x MA979 Inclined Trinocular Head, Siedentopf type, Erect Image with with 0/100 beamsplitter
2 x MA817 SWH10X Widefield high eyepoint eyepiece, FN 22 (each)
1 x MA806 Infinity Corrected Vertical Koehler Illuminator
1 x FT190/115 Light Source: 120VAC, 50-60Hz
1 x FT190/12-36 Single arm light guide, 36", flexible
1 x OKHSL05 Plan APO 5x NA=0.13 WD=44.5 mm Metallurgical objective
1 x OKHSL20 Plan APO 20x NA=0.29 WD=31 mm Metallurgical objective
 
SPECIFICATIONS:
4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height without scope: between 280 and 400 mm or 11"to 16"
Net weight of base: 15 kg or 32 lbs
2 platen bars 50 x 50 x 150 mm long
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