Here are some examples of complete kits for use on small and mid-size or home grown Probe Stations.
Probe stations for small wafers (4” or less) typically come with a stereo microscope at very attractive cost and with extremely long working distance. That is fine for testing 4” wafers with feature sizes in the 10 µm range and above. But fine lines below 10 µm present a problem because of maximum available magnification to 150X or 200X with some severe degradation. Another problem is the illumination, typically with a fluorescent ring light.This solution has its drawbacks when viewing a shiny wafer surface.
A compound microscope with available magnifications up to 1000X or more and Koehler illumination with fiber optic light source eliminates these problems. But the industry standard, Mitutoyo’s Finescope FS70, cannot be justified from a pricing viewpoint for a small probe station under $5000. That is also true for Motic’s PSM- 1000, albeit to a lesser degree. There is a weight problem, too. Most small stations cannot support their weight without some flexing.
This MEIJI FU1000 series based solution is a much better match with pricing at $4000 and weight below 15 pounds. You can use the pole mount coming as standard with many small probe stations or you can bolt to a vertical surface as with the Mitutoyo FS70 or Motic PSM-1000. The hole pattern is not the same but we can supply an adapter or you can make one yourself.

You can use a Mitutoyo or workalike objective directly.
Image on the left shows a FU1000 based scope with trinocular head and quintuple nosepiece with 26 mm Mitutoyo compatible threading.
A pole mount adapter is a low cost option.

Some LWD NIR objectives come with DIN threading. Those and DIN objectives will fit with the help of an adapter.

 Please contact us with any questions.

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Description

Part # / Price

FU1000, quintuple nosepiece, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X objective

FU0KTED360520 K        $4119

FU1000, quintuple nosepiece, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X objective

FU0KTED360520 D        $5150

FU1000, quintuple nosepiece, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 10X, 50X objective

FU0KTED362050 K        $4920

FU1000, quintuple nosepiece, Monocular head, 10X comp. Eyepiece, illuminator, light source, 36in fiber optic guide, 5X, 20X objective

FU0KM360520K       $3100

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